Primjena elipsometrije u znanosti i tehnologiji

undergraduate thesis

• Title (english): Application of the ellipsometry in science and technology
• Author: Lucija Detić
• Mentor: Vladimir Dananić (mentor)
• Mentor: Davor Ristić (komentor)
• Committee member: Vladimir Dananić (predsjednik povjerenstva)
• Committee member: Iva Movre Šapić (član povjerenstva)
• Committee member: Davor Ristić (član povjerenstva)
• Granter: University of Zagreb; Faculty of Chemical Engineering and Technology; Zagreb
• Defense date and country: 2021-09-13, Croatia
• Scientific / art field, discipline and subdiscipline: NATURAL SCIENCES; Physics

Abstract

Elipsometrija je optička tehnika koja se koristi za određivanje svojstava površina i tankih filmova. Zasniva se na mjerenju promjene polarizacije nakon refleksije od uzorka i zatim je uspoređuje s modelom. Ova tehnika ima vrlo široku primjenu za karakterizaciju sastava, hrapavosti, debljine, kristalne prirode tvari, električne vodljivosti i određivanje mnogih drugih svojstava tankih filmova. Elipsometrija je vrlo precizna tehnika jer ne mjeri točne vrijednosti, već kompleksan omjer preko kojeg računamo željene vrijednosti. Prilikom izvođenja eksperimenta mjerimo parametre ψ ( amplituda ) i Δ ( fazni pomak) , te ćemo uporabom odgovarajućih jednadžbi, navedenih u ovom radu, odrediti svojstva uzorka. U ovom radu prikazali smo primjenu elipsometrije mjereći amplitudu i fazni pomak na uzorcima silicijeva dioksida i titanijeva dioksida, te smo na temelju tih parametara odredili svojstva filmova.

Abstract (english)

Ellipsometry is an optical technique used to determine the properties of surfaces and thin films. It is based on measuring the changes in polarization after reflection from the sample and then comparing it with the model. This technique has a very wide application for characterization of composition, roughness, thickness, crystal nature of matter, electrical conductivity and determination of many other properties of thin films. Ellipsometry is a very precise technique because it does not measure exact values, but it mesaure a complex ratio through which we calculate the desired values. When performing the experiment of the measurement parameters ψ (amplitude) and Δ (phase shift), using various individual equations that we will bring up in this paper, we can determine the properties of the sample. In this paper, we presented an example of ellipsometry measuring the amplitude and phase shift in a sample of silicon dioxide and titanium dioxide, and based on these parameters we determined the properties of the films.

• Keywords: elipsometrija; tanki filmovi; amplituda; fazni pomak; silicijev dioksid; titanijev dioksid
• Keywords (english): ellipsometry; thin films; amplitude; phase shift; silicon dioxide; titanium dioxide
• Language: croatian
• URN:NBN: urn:nbn:hr:149:178431
• Study programme: Title: Materials Science and Engineering - Undergraduate study; Study programme type: university; Study level: undergraduate; Academic / professional title: sveučilišni/a prvostupnik/ prvostupnica (baccalaureus/baccalaurea) inženjer/inženjerka kemijskog inženjerstva (sveučilišni/a prvostupnik/ prvostupnica (baccalaureus/baccalaurea) inženjer/inženjerka kemijskog inženjerstva)
• Type of resource: Text
• File origin: Born digital
• Access conditions: Access restricted to students and staff of home institution
• Created on: 2023-03-27 12:09:40